Characteristics of glow discharge in gas flow.
نویسندگان
چکیده
منابع مشابه
Emission and sputtering characteristics of Ne-Ar mixed gas glow discharge plasmas.
The emission characteristics of several Cu lines emitted from a Ne-Ar mixed gas glow discharge plasma were investigated. The addition of small amounts of Ar to a Ne plasma increases the sputtering rate of a Cu sample because Ar ions, which work as the impinging ions for cathode sputtering, are predominantly produced through Penning ionization collisions between Ne metastables and Ar atoms. Ar a...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials
سال: 1988
ISSN: 0385-4205,1347-5533
DOI: 10.1541/ieejfms1972.108.421